Linde invests €2.5 million in new manufacturing facility
13 June 2011
This investment could bring a reduction in CO2 emissions of more than three million tonnes for microelectronics manufacturers.
The Linde Gases Division, part of The Linde Group, has announced the opening of its new manufacturing facility to produce next generation on-site fluorine system equipment in Inju City, South Korea.
This newly built facility aims to meet the increasing demand for Linde’s fluorine (F2) technology worldwide.
Microelectronics manufacturers are adopting Linde’s on-site fluorine systems as a more secure supply enabling higher productivity and increased energy-efficiency. Linde’s fluorine generators provide them with an environmentally friendly alternative to greenhouse gas nitrogen trifluoride (NF3) and other PFC (Per-Fluoro-Compound) gases for the cleaning of CVD (Chemical Vapour Deposition) chambers.
"This €2.5 million investment in the new state-of-the-art fluorine systems facility is essential to support the continuous growth of our Asian customer base," stated Carl Jackson, Head of Fluorine Business for the Linde Gases Division.
Linde’s 3,700 square-metre facility integrates equipment assembly and chemical processing, while streamlining manufacturing operations. It is adjacent to the existing Linde Fluorine Centre of Excellence, which incorporates Linde’s Fluorine Business Operations Support Centre, Research and Development, Quality Assurance and Customer Training facilities. Both are located close to key customers and suppliers in the Yellow Sea Free Economic Zone in Chungnam province, 60km south of Seoul in South Korea. The site also houses a dedicated Linde electronic special gases facility.
The new expansion shows Linde’s ongoing commitment to on-site F2 technology. Research sectors and manufacturers of photovoltaic, semiconductor and TFT-LCD devices have recently ordered Linde’s on-site fluorine technology.
“We welcome and fully support the continued investment in on-site F2 technology as it supports our growth plans, particularly in the Korean electronics markets,” said Brett Kimber, President of Linde Korea.
The Linde Generation-F on-site F2 generator has been through extensive third-party safety evaluations. Linde now operates over 30 Generation-F systems worldwide to meet the needs of chamber cleaning from semiconductor, display and photovoltaic industries.
The new facility brings to five the number of Linde’s electronics technology centres worldwide. Other facilities are located in San Marcos (California, USA), Alpha (New Jersey, USA), Bielefeld (Germany), and Kaohsiung (Taiwan).
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